Leak Testing

For sensitive leak testing, the mass spectrometer should have the capability of yielding an unambiguous response to a helium partial pressure of:

13 kPa (100 mm Hg)

13 GPa (10 8 mm Hg)

1.3 Pa(10 -2 mm Hg)

1.3 nPa (10 -11 mm Hg)